Measure Mode
CSI - Coherence Scanning Interferometry -This is the default starting point and good for most parts.
CSI - Rough - This mode makes CSI measurements using a narrower bandwidth illumination spectrum to improve performance on rough parts and sometimes on parts with high slopes. It generally improves data coverage, but with a decrease in vertical resolution. The improvement is part-dependent and should be compared with CSI results.
3X CSI - This mode makes sub-Nyquist CSI measurements at 3X the nominal scan rate to provide higher throughput, but with a decrease in vertical resolution. 3X CSI measurements are compatible with PZT and extended scans.
5X CSI - This mode makes sub-Nyquist CSI measurements at 5X the nominal scan rate to provide even higher throughput, but with a further decrease in vertical resolution.
Smart PSI - Smart PSI combines a CSI scan to focus the instrument and determine the coherence profile of the surface with a series of rapid PSI (phase-shifting interferometry) measurements to determine the high-resolution phase profile of the surface. This mode is ideal for smooth parts with low departure (PV < few microns) and is the best option for super-smooth parts.
Z Resolution
High - The phase and coherence profiles are combined to provide the final height map. Provides highest vertical resolution.
Normal - The coherence profile is taken to be the surface height. Provides most data on challenging parts, but at lower vertical resolution.